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Control of Thermal Microactuator-Based, Dual-Stage Actuation Systems

Authors :
Chee Khiang Pang
Chunling Du
Source :
Multi-Stage Actuation Systems and Control
Publication Year :
2018
Publisher :
CRC Press, 2018.

Subjects

Subjects :
Microactuator
Materials science
Control theory
Thermal
Dual stage

Details

Database :
OpenAIRE
Journal :
Multi-Stage Actuation Systems and Control
Accession number :
edsair.doi...........5cb8cd469f0a5cf5f8174bc4e5e0eecc

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