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Study on Dynamic Simulation Technology of Polar Coordinates Wafer-Handling Robot

Authors :
Mei Zhen Zhang
Sheng Fang Zhang
Zhi Hua Sha
Source :
Advanced Materials Research. :2086-2089
Publication Year :
2011
Publisher :
Trans Tech Publications, Ltd., 2011.

Abstract

Based on the analysis of the structure, function and transmission ways of polar coordinates wafer-handling robot, the radial liner stretching kinematics model of wafer-handling robot is established, and the kinematics character of the robot is analyzed, the kinematics equations of the robot is established. Finally, based on Microsoft Visual Studio 2008 and Pro/toolkit, the dynamic simulation of polar coordinates wafer-handling robot is realized.

Details

ISSN :
16628985
Database :
OpenAIRE
Journal :
Advanced Materials Research
Accession number :
edsair.doi...........5be8ec29603c68e02f454a8c6122dd61