Feasibility study of splitting pitch technology on 45nm contact patterning with 0.93 NA

MLA

Bo Yun Hsueh, et al. “Feasibility Study of Splitting Pitch Technology on 45nm Contact Patterning with 0.93 NA.” SPIE Proceedings, Mar. 2007. EBSCOhost, widgets.ebscohost.com/prod/customlink/proxify/proxify.php?count=1&encode=0&proxy=&find_1=&replace_1=&target=https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&scope=site&db=edsair&AN=edsair.doi...........5b76af239293376c290c5de139593094&authtype=sso&custid=ns315887.

APA

Bo Yun Hsueh, Yueh Lin Chou, Ting Cheng Tseng, Yung Feng Cheng, & Chuen Huei Yang. (2007). Feasibility study of splitting pitch technology on 45nm contact patterning with 0.93 NA. SPIE Proceedings.

Chicago

Bo Yun Hsueh, Yueh Lin Chou, Ting Cheng Tseng, Yung Feng Cheng, and Chuen Huei Yang. 2007. “Feasibility Study of Splitting Pitch Technology on 45nm Contact Patterning with 0.93 NA.” SPIE Proceedings, March. http://widgets.ebscohost.com/prod/customlink/proxify/proxify.php?count=1&encode=0&proxy=&find_1=&replace_1=&target=https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&scope=site&db=edsair&AN=edsair.doi...........5b76af239293376c290c5de139593094&authtype=sso&custid=ns315887.