Towards understanding uniformity of megasonic-assisted through-mask electrochemical micromachining based on bubble dynamics

Authors :: Mingxin Yu
Liqun Du
Ke Zhai
Haohao Cheng
Fenglai Wang
Aoqi Li
Zhongmin Wang
Source :: Journal of Manufacturing Processes. 96:125-137
Publication Year :: 2023
Publisher :: Elsevier BV, 2023.

Subjects :: Strategy and Management
Management Science and Operations Research
Industrial and Manufacturing Engineering

Tools