Hard X-Ray Nano-Interferometer and Its Application to High-Spatial-Resolution Phase Tomography

A hard X-ray nano-interferometer using two types of zone plate has been developed. One is an ordinary zone plate for a microscope objective, and the other is a newly designed zone plate called an "annular zone plate" for configuring reference waves. We have succeeded in producing interference fringes with variable periods up to a fringeless pattern. The phase-shift distribution of polystyrene microparticles could be imaged clearly with a spatial resolution of 60 nm and a phase sensitivity of λ/40 at a photon energy of 8 keV. Furthermore, this interferometer was applied to phase tomography for high-spatial-resolution three-dimensional observation.