Interfacial effect on thermal conductivity of Y2O3 thin films deposited on Al2O3

The interfacial effect on thermal conductivity is studied with Y 2 O 3 thin films deposited on an Al 2 O 3 substrate. Y 2 O 3 thin films with the thickness between 100 and 500 nm are prepared using rf magnetron sputtering and thermal conductivity of the films is measured using the 3 ω method. The strong film thickness-dependent thermal conductivity due to the interfacial thermal resistance is observed. The film thickness-dependent thermal conductivity is explained by an interface thermal resistance between the film and substrate.