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Metal-Silicon Reactions With Laser Pulses

Authors :
E. D'Anna
A. Luches
G. Leggieri
M. R. Perrone
Source :
SPIE Proceedings.
Publication Year :
1988
Publisher :
SPIE, 1988.

Abstract

The work done on the synthesis of metal silicides by using different pulsed lasers (ruby, Nd:glass, excimer) is presented and discussed. We found that excimer lasers offer much better characteristics for annealing of metal/silicon systems in comparison to solid state lasers.

Subjects

Subjects :
Materials science
Silicon
business.industry
Annealing (metallurgy)
Ti:sapphire laser
chemistry.chemical_element
Laser pumping
Excimer
Laser
law.invention
Metal
chemistry
law
visual_art
visual_art.visual_art_medium
Optoelectronics
business
Tunable laser

Details

ISSN :
0277786X
Database :
OpenAIRE
Journal :
SPIE Proceedings
Accession number :
edsair.doi...........588a0346982a84d9fdf1aaf02fdb4e5b

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