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Low-Temperature Direct Synthesis of Multilayered h-BN without Catalysts by Inductively Coupled Plasma-Enhanced Chemical Vapor Deposition

Authors :
Masaya Yamamoto
Hiromasa Murata
Noriyuki Miyata
Hiroshi Takashima
Masayoshi Nagao
Hidenori Mimura
Yoichiro Neo
Katsuhisa Murakami
Source :
ACS Omega. 8:5497-5505
Publication Year :
2023
Publisher :
American Chemical Society (ACS), 2023.

Subjects

Subjects :
General Chemical Engineering
General Chemistry

Details

ISSN :
24701343
Volume :
8
Database :
OpenAIRE
Journal :
ACS Omega
Accession number :
edsair.doi...........5849b26ade6254c0e4d556a272585a63

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