Numerical investigations of the influence of different commonly applied approximations in scatterometry

MLA

Johannes Endres, et al. “Numerical Investigations of the Influence of Different Commonly Applied Approximations in Scatterometry.” SPIE Proceedings, May 2013. EBSCOhost, widgets.ebscohost.com/prod/customlink/proxify/proxify.php?count=1&encode=0&proxy=&find_1=&replace_1=&target=https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&scope=site&db=edsair&AN=edsair.doi...........580c3a7c438f75c2cfb2b0c6f5356a54&authtype=sso&custid=ns315887.

APA

Johannes Endres, Bernd Bodermann, Sven Burger, & Matthias Wurm. (2013). Numerical investigations of the influence of different commonly applied approximations in scatterometry. SPIE Proceedings.

Chicago

Johannes Endres, Bernd Bodermann, Sven Burger, and Matthias Wurm. 2013. “Numerical Investigations of the Influence of Different Commonly Applied Approximations in Scatterometry.” SPIE Proceedings, May. http://widgets.ebscohost.com/prod/customlink/proxify/proxify.php?count=1&encode=0&proxy=&find_1=&replace_1=&target=https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&scope=site&db=edsair&AN=edsair.doi...........580c3a7c438f75c2cfb2b0c6f5356a54&authtype=sso&custid=ns315887.