Comparative analysis of Bragg and Laue diffraction from CdF2-CaF2 superlattices on Si(111)

Short-period superlattices (SL) with periods from 7 to 22 nm were grown by MBE in the CdF2-CaF2 system on Si(111). X-ray diffraction measurements of these structures in various reflection and transmission geometries demonstrate the possibility of producing such objects with a high crystal perfection. Specific features of diffraction from an SL with layers possessing substantially different diffracting abilities and strains of opposite signs with respect to the substrate are considered. The main parameters of the grown SLs have been obtained by simulation in semikinematic approximation. The applicability of the model of a perfect SL to objects with structural defects has been demonstrated.