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Ultrashort-pulse laser processing of transparent materials: insight from numerical and semi-analytical models

Authors :
Mikhail P. Fedoruk
Ondřej Haderka
Tomas Mocek
Ladislav Fekete
Vladimir P. Zhukov
Alexander M. Rubenchik
Nadezhda M. Bulgakova
Yuri P. Meshcheryakov
Václav Michálek
Jan Tomastik
Inam Mirza
Source :
Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXI.
Publication Year :
2016
Publisher :
SPIE, 2016.

Abstract

Interaction of ultrashort laser pulses with transparent materials is a powerful technique of modification of material properties for various technological applications. The physics behind laser-induced modification phenomenon is rich and still far from complete understanding. We present an overview of our models developed to describe processes induced by ultrashort laser pulses inside and on the surface of bulk glass. The most sophisticated model consists of two parts. The first part solves Maxwell’s equations supplemented by the rate and hydrodynamics equations for free electrons. The model resolves spatiotemporal dynamics of free-electron population and yields the absorbed energy map. The latter serves as an initial condition for thermoelastoplastic simulations of material redistribution. The simulations performed for a wide range of irradiation conditions have allowed to clarify timescales at which modification occurs after single laser pulses. Simulations of spectrum of laser light scattered by laser-generated plasma revealed considerable blueshifting which increases with pulse energy. To gain insight into temperature evolution of a glass material under the surface irradiation conditions, we employ a model based on the rate equation describing free electron generation coupled with the energy equations for electrons and lattice. Swift heating of electron and lattice subsystems to extremely high temperatures at fs timescale has been found at laser fluences exceeding the threshold fluence by 2-3 times that can result in efficient bremsstrahlung emission from the irradiation spot. The mechanisms of glass ablation with ultrashort laser pulses are discussed by comparing with the experimental data. Finally, a model is outlined, developed for multi-pulse irradiation regimes, which enables gaining insight into the roles of defects and heat accumulation.

Details

ISSN :
0277786X
Database :
OpenAIRE
Journal :
Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXI
Accession number :
edsair.doi...........56d30f9cc0a06ca1b24e6e076261f0a3
Full Text :
https://doi.org/10.1117/12.2217585