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A compensating method of convex corner in etching of (110) silicon

Authors :
Nam Chol Yu
Chung-Hyok Jon
KyongIl Chu
KumJun Ryang
Source :
Microsystem Technologies. 28:2541-2547
Publication Year :
2022
Publisher :
Springer Science and Business Media LLC, 2022.

Subjects

Subjects :
Hardware and Architecture
Electrical and Electronic Engineering
Condensed Matter Physics
Electronic, Optical and Magnetic Materials

Details

ISSN :
14321858 and 09467076
Volume :
28
Database :
OpenAIRE
Journal :
Microsystem Technologies
Accession number :
edsair.doi...........56bea831dbc3480afd0b1cfd24ab2877

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