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Preface

Authors :
Gabi Grützner
Olaf Fortagne
Dieter P. Kern
Source :
Microelectronic Engineering. 98:102
Publication Year :
2012
Publisher :
Elsevier BV, 2012.

Subjects

Subjects :
Electrical and Electronic Engineering
Condensed Matter Physics
Atomic and Molecular Physics, and Optics
Surfaces, Coatings and Films
Electronic, Optical and Magnetic Materials

Details

ISSN :
01679317
Volume :
98
Database :
OpenAIRE
Journal :
Microelectronic Engineering
Accession number :
edsair.doi...........56b27caeaad107c7751f9cceaef03d3a
Full Text :
https://doi.org/10.1016/j.mee.2012.08.001
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