Nanosecond laser silicon micromachining

MLA

Lambertus Hesselink, et al. “Nanosecond Laser Silicon Micromachining.” SPIE Proceedings, July 2004. EBSCOhost, https://doi.org/10.1117/12.529442.

APA

Lambertus Hesselink, Helen Howard, Alan J. Conneely, Sergei S. Orlov, & Jun Ren. (2004). Nanosecond laser silicon micromachining. SPIE Proceedings. https://doi.org/10.1117/12.529442

Chicago

Lambertus Hesselink, Helen Howard, Alan J. Conneely, Sergei S. Orlov, and Jun Ren. 2004. “Nanosecond Laser Silicon Micromachining.” SPIE Proceedings, July. doi:10.1117/12.529442.