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Single-mode and ultra-broadband gigahertz surface acoustic waveguides on AlN-on-SiC substrates
- Source :
- Journal of Physics D: Applied Physics. 55:425106
- Publication Year :
- 2022
- Publisher :
- IOP Publishing, 2022.
-
Abstract
- This paper proposes a class of high-performance surface acoustic wave (SAW) waveguides based on AlN-on-SiC substrates. Under the existing crystal growth and processing technology, these SAW waveguides offer excellent performance in single mode, low loss, ultra-broadband, operating at gigahertz frequencies. Quasi-Rayleigh SAWs can be excited by traditional interdigital transducers and guided freely with excellent efficiency. Based on these SAW waveguides, we further demonstrate SAW splitters and ring cavities with ultra-high qualities up to 107. These SAW components complement future integrated phononic circuits for high-frequency and compact acoustic manipulating, signal processing, sensing, computing, etc.
Details
- ISSN :
- 13616463 and 00223727
- Volume :
- 55
- Database :
- OpenAIRE
- Journal :
- Journal of Physics D: Applied Physics
- Accession number :
- edsair.doi...........5607314bceb572eb0a13c592e2a53594