Development and characterization of multifunctional PECVD SiNX:P layers for laser-doped selective emitters

Authors :: Andreas Wolf
Phedon Palinginis
Mohammad Hassan Norouzi
S. Gutscher
Elmar Lohmüller
Dirk-Holger Neuhaus
Julian Weber
Jan Benick
Marc Hofmann
Sven Kluska
Bernd Bitnar
Pierre Saint-Cast
Sabrina Lohmüller
Bernd Steinhauser
Jonas Bartsch
Source :: AIP Conference Proceedings.
Publication Year :: 2018
Publisher :: Author(s), 2018.

Subjects :: Materials science
law
business.industry
Plasma-enhanced chemical vapor deposition
Doping
Optoelectronics
Laser
business
law.invention
Characterization (materials science)

Full Text Access

Tools