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In-situ synchrotron x-ray studies of the microstructure and stability of In2O3 epitaxial films
- Source :
- Applied Physics Letters. 111:161602
- Publication Year :
- 2017
- Publisher :
- AIP Publishing, 2017.
-
Abstract
- We report on the synthesis, stability, and local structure of In2O3 thin films grown via rf-magnetron sputtering and characterized by in-situ x-ray scattering and focused x-ray nanodiffraction. We find that In2O3 deposited onto (0 0 1)-oriented single crystal yttria-stabilized zirconia substrates adopts a Stranski–Krastanov growth mode at a temperature of 850 °C, resulting in epitaxial, truncated square pyramids with (1 1 1) side walls. We find that at this temperature, the pyramids evaporate unless they are stabilized by a low flux of In2O3 from the magnetron source. We also find that the internal lattice structure of one such pyramid is made up of differently strained volumes, revealing local structural heterogeneity that may impact the properties of In2O3 nanostructures and films.
- Subjects :
- 010302 applied physics
Materials science
Nanostructure
Physics and Astronomy (miscellaneous)
business.industry
02 engineering and technology
Sputter deposition
021001 nanoscience & nanotechnology
Epitaxy
Microstructure
01 natural sciences
Crystallography
Sputtering
0103 physical sciences
X-ray crystallography
Optoelectronics
Thin film
0210 nano-technology
business
Single crystal
Subjects
Details
- ISSN :
- 10773118 and 00036951
- Volume :
- 111
- Database :
- OpenAIRE
- Journal :
- Applied Physics Letters
- Accession number :
- edsair.doi...........553f78885ad133823059b74666c54abf