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Oscillation polishing with a small tool

Authors :
Atsunobu Une
Kenichiro Yoshitomi
Hideki Sugiura
Masaaki Mochida
Source :
The Proceedings of The Manufacturing & Machine Tool Conference. :101-102
Publication Year :
2002
Publisher :
Japan Society of Mechanical Engineers, 2002.

Subjects

Subjects :
Engineering drawing
Materials science
Oscillation
Polishing
Wafer
Engineering physics

Details

ISSN :
24243094
Database :
OpenAIRE
Journal :
The Proceedings of The Manufacturing & Machine Tool Conference
Accession number :
edsair.doi...........551907f2e95e06d19dd09fa9475d3c31
Full Text :
https://doi.org/10.1299/jsmemmt.2002.4.101
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Authors Abstract Subjects Details