Planar multielectrode current source based on nanoscale carbon structures with the low-threshold field emission

The results of modeling and development of planar multielectrode current sources based on nanoscale carbon structures with the low-threshold field emission are described. Mechanism of low-threshold field emission can be explained by the model, which describes the efficiency of tunneling of electrons from the carbon film into vacuum due to the existence of nanoscale clusters of two phases of DLC - diamond and graphite. Results of the structures tests indicating an average level of achieving the emission current density of 0.2–0.3 A/cm2 are shown. In recalculation on the thickness and perimeter of the emitting area of carbon film, this corresponds to a current density of 700–1000 kA/cm2. Achieved parameters of the described structure make it promising for use in the development of numerous electronic devices with intensive electron beams.