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Applications of Automated High Resolution Strain Mapping in TEM on the Study of Strain Distribution in MOSFETs
- Source :
- Microscopy and Microanalysis. 20:1066-1067
- Publication Year :
- 2014
- Publisher :
- Oxford University Press (OUP), 2014.
Details
- ISSN :
- 14358115 and 14319276
- Volume :
- 20
- Database :
- OpenAIRE
- Journal :
- Microscopy and Microanalysis
- Accession number :
- edsair.doi...........548d801384b6f0289664120a73c7344a
- Full Text :
- https://doi.org/10.1017/s1431927614007053