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Applications of Automated High Resolution Strain Mapping in TEM on the Study of Strain Distribution in MOSFETs

Authors :
Catherine Vartuli
Amith Darbal
T. Aoki
J. K. Weiss
Raman D. Narayan
Stavros Nicolopoulos
J. Mardinly
Source :
Microscopy and Microanalysis. 20:1066-1067
Publication Year :
2014
Publisher :
Oxford University Press (OUP), 2014.

Details

ISSN :
14358115 and 14319276
Volume :
20
Database :
OpenAIRE
Journal :
Microscopy and Microanalysis
Accession number :
edsair.doi...........548d801384b6f0289664120a73c7344a
Full Text :
https://doi.org/10.1017/s1431927614007053