Proton nmr studies of annealed plasma-deposited amorphous Si:H films

Proton magnetic resonance data are presented for plasma-deposited amorphous Si:H as a function of annealing temperature up to 650°C. The data indicate that hydrogen diffuses internally before major evolution occurs, that transfer of hydrogen occurs from a heavily clustered phase to a dilute phase coincident with evolution and that evolution occurs initially from the heavily clustered phase. Comparison with infrared data indicates that the heavily clustered phase can be either SiH x ( x = 2,3) or SiH.