Gate Dielectric Integrity along the Road Map of CMOS Scaling including Multi-Gate Fet, TiN Metal Gate, and HfSiON High-k Gate Dielectric

Future CMOS technology generations may implement multi-gate architectures according to S. M. Kim et al. (2004), D Ha et al. (2004), S.-Y. Kim et al. (2005), W.-S. Liao et al. (2005), S. Maeda et al. (2004), N. Collaert et al. (2005),and C. Jahan et al. (2005), together with a change from SiO2-based to high-k gate dielectrics and a change from poly-silicon to metal gate. The purpose of this work is to identify the influences of multi-gate architecture and metal gate on gate dielectric reliability and to demonstrate the dielectric reliability trend along the road map towards a CMOS process using triple gate architecture, metal gate, and HfSiON gate dielectric