Dose assurance on production-line of thyristor irradiated by electron beam

In order to control the quality of thyristor irradiated by electron beam, it is needed urgently to measure absorbed dose in flake of silicon and determine the optimum condition during irradiation technological testing. According to actual situation of accelerator, the measurement system of electron beam has been built up. Liquid chemical dosimeters (Fricke and ceric sulphate dosimeter) have been taken as secondary standard dosimeters. Blue cellophane thin film dosimeter was applied to measure the dose distribution on irradiation platform so as to decide the extent of irradiation. The dose rate on certain point is measured with transmission chamber. It can also monitor the stability of accelerator. It has been proved that this measurement system can be used for dose measurement of electron beam radiation processing with satisfied precision.