Effects of Fe Content on the Magnetic Properties and Microstructure of Pr-Fe-B Thin Films

Nd-Fe-B magnetic thin films have been regarded as the potential applications in the permanent magnet and micro-electro-mechanical systems (MEMS) because their outstanding magnetic performances [1]. However, the magnetic properties would be deteriorated at 150 K due to the spin reorientation of the hard Nd2Fe14B phase. Therefore, Pr-Fe-B thin film will substitute Nd-Fe-B thin film owing to its very low spin reorientation temperature (∼4.2 K) [2]. However, rare reports investigate about the relation between chemical composition, microstructures, and magnetic properties. In this study, the effect of composition ratio of Pr to Fe on magnetic properties and microstructure would be discussed.