Surface Preparation Techniques for High-k Deposition on Ge Substrates

Authors :: Olivier Richard
Bert Brijs
Bart Onsia
Matty Caymax
Jan Van Steenbergen
Annelies Delabie
Marc Meuris
Chao Zhao
Thierry Conard
Sven Van Elshocht
Marc Heyns
Riikka L. Puurunen
Source :: Solid State Phenomena. :31-36
Publication Year :: 2005
Publisher :: Trans Tech Publications, Ltd., 2005.

Subjects :: Atomic layer deposition
Materials science
Chemical engineering
chemistry
Surface preparation
chemistry.chemical_element
General Materials Science
Germanium
Metalorganic vapour phase epitaxy
Condensed Matter Physics
Deposition (chemistry)
Atomic and Molecular Physics, and Optics
High-κ dielectric

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