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Titanium infiltration into ultrathin PMMA brushes
- Source :
- Journal of Vacuum Science & Technology A. 39:040403
- Publication Year :
- 2021
- Publisher :
- American Vacuum Society, 2021.
-
Abstract
- Vapor phase infiltration (VPI) is a bottom-up process that involves the infiltration of polymers, often using atomic layer deposition compatible precursors. By exposing a polymer to an organo-metallic precursor, area selective material formation is achieved where the precursor reacts with regions covered by an infiltration-receptive polymer brush. Combining receptive and rejecting polymers that have the capability of forming complex nanopatterns could potentially allow for the creation of nanofeatures, offering a route to area selective deposition. This work is concerned with the creation and characterization of titanium-infiltrated films with a VPI process. Thin films of poly(methyl methacrylate) (PMMA) were infused with titanium isopropoxide and subsequently analyzed with angular resolved x-ray photoelectron spectroscopy. All XPS analysis and VPI treatments were completed without breaking vacuum in an integrated ultrahigh vacuum setup, with O 1s, C 1s, Ti 2p, and Si 2p core levels revealing the successful incorporation of titanium into the polymer. Grazing angle Fourier-transform infrared spectroscopy demonstrates the breaking of carbon–oxygen double bonds within the PMMA structure due to titanium incorporation.
- Subjects :
- chemistry.chemical_classification
Materials science
chemistry.chemical_element
Infrared spectroscopy
02 engineering and technology
Surfaces and Interfaces
Polymer
010402 general chemistry
021001 nanoscience & nanotechnology
Condensed Matter Physics
Polymer brush
01 natural sciences
0104 chemical sciences
Surfaces, Coatings and Films
Atomic layer deposition
chemistry.chemical_compound
chemistry
Chemical engineering
X-ray photoelectron spectroscopy
Thin film
Titanium isopropoxide
0210 nano-technology
Titanium
Subjects
Details
- ISSN :
- 15208559 and 07342101
- Volume :
- 39
- Database :
- OpenAIRE
- Journal :
- Journal of Vacuum Science & Technology A
- Accession number :
- edsair.doi...........534a9714139e97d6189136a7e3e12229