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Electrically Testable Product Macro Multi-via Measurement for Within Die CD Variation

Authors :
Carol Boye
DukKyun Moon
Steven McDermott
Norbert Arnold
Nicole Saulnier
Felix Levitov
Sam Choi
Alex Goldenshtein
Uri Smolyan
Noam Amit
Injo Ok
Iqbal Saraf
Source :
2022 33rd Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC).
Publication Year :
2022
Publisher :
IEEE, 2022.

Details

Database :
OpenAIRE
Journal :
2022 33rd Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)
Accession number :
edsair.doi...........52bc90878a883049cac5651f227b2459

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