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Comment on: 'Characterization of Microroughness Parameters in Titanium Nitride Thin Films Grown by DC Magnetron Sputtering' [J Fusion Energ DOI 10.1007/s10894-012-9510-z]

Authors :
Atefeh Ghaderi
Negin Beryani Nezafat
Shahram Solaymani
Source :
Journal of Fusion Energy. 31:591-591
Publication Year :
2012
Publisher :
Springer Science and Business Media LLC, 2012.

Abstract

In recent article [Ali Gelali. Azin Ahmadpourian. Reza Bavadi. M. R. Hantehzadeh. Arman Ahmadpourian. J Fusion Energ DOI 10.1007/s10894-012-9510-z], Ali Geleli et al. studied the PSD and RMS Roughness parameters in Titanium Nitride thin films by AFM data and used the computed fractal dimension value of micrographs to describe the surface morphology of thin films. Here, the correct form of equations and relationship between PSD and RMS will be discussed.

Details

ISSN :
15729591 and 01640313
Volume :
31
Database :
OpenAIRE
Journal :
Journal of Fusion Energy
Accession number :
edsair.doi...........52967132416738bc9dcd8a9395979ca9
Full Text :
https://doi.org/10.1007/s10894-012-9534-4