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Comment on: 'Characterization of Microroughness Parameters in Titanium Nitride Thin Films Grown by DC Magnetron Sputtering' [J Fusion Energ DOI 10.1007/s10894-012-9510-z]
- Source :
- Journal of Fusion Energy. 31:591-591
- Publication Year :
- 2012
- Publisher :
- Springer Science and Business Media LLC, 2012.
-
Abstract
- In recent article [Ali Gelali. Azin Ahmadpourian. Reza Bavadi. M. R. Hantehzadeh. Arman Ahmadpourian. J Fusion Energ DOI 10.1007/s10894-012-9510-z], Ali Geleli et al. studied the PSD and RMS Roughness parameters in Titanium Nitride thin films by AFM data and used the computed fractal dimension value of micrographs to describe the surface morphology of thin films. Here, the correct form of equations and relationship between PSD and RMS will be discussed.
Details
- ISSN :
- 15729591 and 01640313
- Volume :
- 31
- Database :
- OpenAIRE
- Journal :
- Journal of Fusion Energy
- Accession number :
- edsair.doi...........52967132416738bc9dcd8a9395979ca9
- Full Text :
- https://doi.org/10.1007/s10894-012-9534-4