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Process Capability and Elastomer Stamp Lifetime in Micro Transfer Printing
- Source :
- 2016 IEEE 66th Electronic Components and Technology Conference (ECTC).
- Publication Year :
- 2016
- Publisher :
- IEEE, 2016.
-
Abstract
- Elastomer stamp based micro assembly or micro-transfer printing is a practical method for heterogeneous integration of micro-scale devices onto non-native substrates. In this paper, we evaluate the effect of stamp lifetime on performance and assess the useful lifetime of a stamp, both key metrics for using this technology in a manufacturing environment. We also review the performance of micro transfer-printing in several applications where >99% print yields and precise placement has been demonstrated.
- Subjects :
- Materials science
Silicon
Process capability
chemistry.chemical_element
Nanotechnology
02 engineering and technology
Elastomer
chemistry.chemical_compound
020210 optoelectronics & photonics
chemistry
Silicon nitride
Transfer printing
0202 electrical engineering, electronic engineering, information engineering
Key (cryptography)
Subjects
Details
- Database :
- OpenAIRE
- Journal :
- 2016 IEEE 66th Electronic Components and Technology Conference (ECTC)
- Accession number :
- edsair.doi...........5272dee5ca93d2ed956f202f5d0ee64f
- Full Text :
- https://doi.org/10.1109/ectc.2016.349