Optimization, design and analysis of MEMS binary inverter for low frequency SSoC applications

This paper is intended to give a brief overview on design optimization of micro_cantilever based MEMS binary inverter. This brief includes the design and optimization scheme for reduction of key parameters of inverter. Sensor integration with active electronics is one of the key issues in Sensor system on Chip (SSoC) and this work essentially reduces the need of CMOS-MEMS integration. The integration requires two separate process flows and authors believe that lot of resources can be saved if circuit topologies can also be created via MEMS. The inverter has been designed and optimized in detail with respect to [1]. The analytical and simulated design is converging to similar values and hence the current design which this paper proposes can be significant improvement over other reported design. The operational characteristics of this inverter are best suited for bio-medical, speech and low-frequency operations.