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CVD法制备的高结晶质量二维β-Ga2O3薄膜性质研究
- Source :
- Laser & Optoelectronics Progress. 59:1931003
- Publication Year :
- 2022
- Publisher :
- Shanghai Institute of Optics and Fine Mechanics, 2022.
- Subjects :
- Electrical and Electronic Engineering
Atomic and Molecular Physics, and Optics
Subjects
Details
- ISSN :
- 10064125
- Volume :
- 59
- Database :
- OpenAIRE
- Journal :
- Laser & Optoelectronics Progress
- Accession number :
- edsair.doi...........51de3da3e0a5627d27804cdcb0672e5e