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Probability approach for investigation of MOST threshold voltage dependence on gate electrode length

Authors :
E. Goranova
T. Balabanska
D. Simeonov
Source :
Microelectronics Reliability. 30:51-53
Publication Year :
1990
Publisher :
Elsevier BV, 1990.

Abstract

The apparent expression of MOST threshold voltage distribution with arbitrary mask-level gate length is obtained. It is shown that calculated and experimental distributions are in good agreement in the case of a short channel device.

Details

ISSN :
00262714
Volume :
30
Database :
OpenAIRE
Journal :
Microelectronics Reliability
Accession number :
edsair.doi...........51cca5688753b77cbef8be865a8e56da