Backside‐illuminated InAs1−xSbx‐InAs narrow‐band photodetectors

High‐performance backside‐illuminated photodiodes have been fabricated for the first time from InAs1−xSbx‐InAs heterostructures prepared by liquid‐phase‐epitaxy technique. The peak wavelength can be tuned compositionally from 3.1 to over 7.0 μm at 77 K. The half‐width of the spectral responses as narrow as 1760 A (at 4.0 μm) have been achieved. Internal quantum efficiencies of 90% and zero‐bias‐resistance–area products of 2×107 Ω cm2 have been obtained at 77 K.