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Etching of TiO2 nanopillar arrays by nanosphere lithography for broadband infrared antireflection applications
- Source :
- Infrared Physics & Technology. 128:104500
- Publication Year :
- 2023
- Publisher :
- Elsevier BV, 2023.
Details
- ISSN :
- 13504495
- Volume :
- 128
- Database :
- OpenAIRE
- Journal :
- Infrared Physics & Technology
- Accession number :
- edsair.doi...........50fdfee65f3d35caf99b1ec3f77596ec
- Full Text :
- https://doi.org/10.1016/j.infrared.2022.104500