High Durability Latch-Lock Bi-Stable Switch on Y-Shaped Cantilever

A planar bi-stable switch with high durability based on latch-lock mechanism is presented. The bi-stable mechanism relies on a simple Y-shaped silicon cantilever to lock or release a latch pair. Setting and resetting of the switch are achieved by 12.5 V activation applied to a single electrothermal actuator. The mechanical switch exhibits high durability by remaining intact after ∼270,000 switching cycles, outlasting the driving actuator linkage that is used for testing its durability.