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ホログラムスケールを用いたエンコーダの高精度化
- Source :
- Journal of the Japan Society for Precision Engineering. 89:336-342
- Publication Year :
- 2023
- Publisher :
- Japan Society for Precision Engineering, 2023.
- Subjects :
- Mechanical Engineering
Subjects
Details
- ISSN :
- 1882675X and 09120289
- Volume :
- 89
- Database :
- OpenAIRE
- Journal :
- Journal of the Japan Society for Precision Engineering
- Accession number :
- edsair.doi...........50d6282a2f14155f8382cc8fe0b04932
- Full Text :
- https://doi.org/10.2493/jjspe.89.336