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Structure and Hardness Evolution of Silicon Carbide Epitaxial Layers Irradiated with He+} Ions

Authors :
V. V. Pilko
Piotr Budzynski
F. F. Komarov
Source :
Acta Physica Polonica A. 136:351-355
Publication Year :
2019
Publisher :
Institute of Physics, Polish Academy of Sciences, 2019.

Subjects

Subjects :
chemistry.chemical_compound
Materials science
chemistry
Chemical engineering
Silicon carbide
General Physics and Astronomy
Irradiation
Epitaxy
Ion

Details

ISSN :
05874246 and 1898794X
Volume :
136
Database :
OpenAIRE
Journal :
Acta Physica Polonica A
Accession number :
edsair.doi...........50c7efa9d419ab986839c211f93d9068

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