Oxide Phase Formation in Excimer Laser Processed Ti Alloy

Excimer laser surface processing of Ti-6A1-4V results in substantial surface oxygen incorporation as measured by the narrow resonance in the elastic scattering of a particles at 3.05 MeV. Single pulse processing at 1.0 J-cm−2 results in transformation from the original a + β grain structure to a martensite structure. Multiple pulse processing results in oxygen incorporation proportional to the number of pulses during processing, but this is primarily reflected in the depth of the oxygen containing layer. A maximum oxygen to titanium ratio of 1.0 was observed in the surface layer. This was confirmed by transmission electron microscopy (TEM) which showed the development of a fine-grained equiaxed TiO surface layer from a phase mixture of Ti alloy with TiO precipitates. Concentration vs. depth profiles show that this layer is approximately 400 nm thick after 40 pulses. Further processing with a total of 60 pulses results in coarsening of the grains and an increase in the thickness of the layer. The TiO precipitate concentration increases gradually, becoming apparent in electron diffraction patterns after 30 pulses. No other oxide phases are observed, the TiO developing directly from the metallic phases. In particular, we do not observe the formation of Ti2O prior to the formation of the TiO, or the formation of TiO2.