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Study on Metal Film Formation by Large-area Electron Beam Irradiation

Authors :
Togo Shinonaga
Akira Okada
Sadao Sano
Masashi Takata
Source :
International Journal of Electrical Machining. 21:7-12
Publication Year :
2016
Publisher :
Japan Society of Electrical Machining Engineers, 2016.

Subjects

Subjects :
0209 industrial biotechnology
Materials science
business.industry
02 engineering and technology
Sputter deposition
Electron beam physical vapor deposition
Electron beam irradiation
Metal
020303 mechanical engineering & transports
020901 industrial engineering & automation
0203 mechanical engineering
visual_art
visual_art.visual_art_medium
Optoelectronics
Electron beam-induced deposition
business

Details

ISSN :
21885117 and 13417908
Volume :
21
Database :
OpenAIRE
Journal :
International Journal of Electrical Machining
Accession number :
edsair.doi...........5081bb5d2f1b3f277102dc568d7210f6
Full Text :
https://doi.org/10.2526/ijem.21.7
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