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The performance of thin film carbon materials and carbon nanotubes as cold cathodes
- Source :
- Eleventh International Vacuum Microelectronics Conference. IVMC'98 (Cat. No.98TH8382).
- Publication Year :
- 2002
- Publisher :
- IEEE, 2002.
-
Abstract
- In this work we have studied the field emission from three different types of carbon films: (i) a-C:H:N deposited using an inductively coupled rf PECVD process, where the N content in the films can be as high as 30 at%. (ii) Cathodic arc deposited tetrahedral amorphous carbon (ta-C) with embedded regions of carbon nanotube and onion structures. (iii) Unoriented carbon nanotube films on a porous substrate. These films were formed by filtering a solution of nanotubes dispersed in alcohol through the pores (0.2 um dia.) and drying.
Details
- Database :
- OpenAIRE
- Journal :
- Eleventh International Vacuum Microelectronics Conference. IVMC'98 (Cat. No.98TH8382)
- Accession number :
- edsair.doi...........4f962a68430eaf2a966682bfef0c9e51
- Full Text :
- https://doi.org/10.1109/ivmc.1998.728707