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AES Study of Boron Diffusion in Silicon from a Boron Nitride Source with Hydrogen Injection

Authors :
G. Pignatel
G. Queirolo
Source :
Journal of The Electrochemical Society. 126:1805-1810
Publication Year :
1979
Publisher :
The Electrochemical Society, 1979.

Details

ISSN :
19457111 and 00134651
Volume :
126
Database :
OpenAIRE
Journal :
Journal of The Electrochemical Society
Accession number :
edsair.doi...........4f7c26045859f57230840e5472dbc88a
Full Text :
https://doi.org/10.1149/1.2128801