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Hierarchically Ordered Arrays of Noncircular Silicon Nanowires Featured by Holographic Lithography Toward a High-Fidelity Sensing Platform

Authors :
Hwan Chul Jeon
Seung-Man Yang
Chul-Joon Heo
Su Yeon Lee
Source :
Advanced Functional Materials. 22:4268-4274
Publication Year :
2012
Publisher :
Wiley, 2012.

Subjects

Subjects :
Materials science
Fabrication
media_common.quotation_subject
Holography
Fidelity
Nanotechnology
Condensed Matter Physics
Electronic, Optical and Magnetic Materials
law.invention
Interference lithography
Biomaterials
law
Electrochemistry
Silicon nanowires
Lithography
media_common
Photonic crystal

Details

ISSN :
1616301X
Volume :
22
Database :
OpenAIRE
Journal :
Advanced Functional Materials
Accession number :
edsair.doi...........4f5d73ebd58a7bc8c20d1cbdacca19ce

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