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Minority Carrier Lifetime Scan Maps Applied to Metallic Impurity Detection in Silicon Wafers

Authors :
Olivier Palais
Source :
Solid State Phenomena. :267-274
Publication Year :
2001
Publisher :
Trans Tech Publications, Ltd., 2001.

Subjects

Subjects :
Materials science
business.industry
Analytical chemistry
Carrier lifetime
Condensed Matter Physics
Atomic and Molecular Physics, and Optics
Metal
Impurity
visual_art
visual_art.visual_art_medium
Optoelectronics
General Materials Science
Wafer
business

Details

ISSN :
16629779
Database :
OpenAIRE
Journal :
Solid State Phenomena
Accession number :
edsair.doi...........4f223e4fd5d66c34745f0ffcafe7437b

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Authors Abstract Subjects Details