Composition control of lead zirconate titanate thin films using mixed solutions of pbtio3 and pbzro3

Preparation of many amounts of thin film samples with different compositions takes long time. To confirm the possibility of brief and systematic preparation process of oxide films using a chemical solution deposition method, precursor solutions of PbTiO3 and PbZrO3 are synthesized, and those solutions were mixed various volume rate to change the composition of Pb(Zr x Ti1-x)O3 series samples from x=0.1 to 0.9. PbTiO3 and PbZrO3 solutions were mixed just before the film deposition process. The dielectric and ferroelectric properties were evaluated systematically. The relative dielectric constant took a peak around x=0.5. On the other hand, well-saturated P-E hysteresis curves were observed for x=0.3 to 0.9. The remanent polarization and coercive field decreased with increasing Zr content x. These results are consistent with the ferroelectric properties of bulk and film PZT prepared conventional method. Therefore, mixed solution method results in reliable and brief process to discover new oxide mat...