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Development of electrochemical micro machining for air-lubricated hydrodynamic bearings

Authors :
Eojin Lee
Yong-Hwan Moon
C.-H. Won
J.-W. Park
Source :
Microsystem Technologies. 9:61-66
Publication Year :
2002
Publisher :
Springer Science and Business Media LLC, 2002.

Abstract

A specially-built EMM (Electrochemical Micro Machining)/PECM (Pulse Electrochemical Machining) cell, a electrode tool filled with non-conducting material, a electrolyte flow control system and a small & stable gap control unit are developed to achieve accurate dimensions of spindle recesses. Two electrolytes, aqueous sodium nitrate and aqueous sodium chloride are investigated in this study. The former electrolyte with few pits on the surface of workpiece has better machine-ability than the latter one with many pits on the surface of workpiece. It is easier to control the machining depth precisely with pulse electrical current than direct electrical current. This paper also presents an identification method for the machining depth by in-process analysis of applied electrical current and interelectrode gap size. The interelectrode gap characteristics, including pulse electrical current, effective volumetric electrochemical equivalent and electrolyte conductivity variations, are analyzed using the model and experimental results.

Details

ISSN :
09467076
Volume :
9
Database :
OpenAIRE
Journal :
Microsystem Technologies
Accession number :
edsair.doi...........4e68fcdb8cfa855ff8e0da1f88e9c12d