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Experimentally informed structure optimization of amorphous TiO2 films grown by atomic layer deposition
- Source :
- Nanoscale. 15:718-729
- Publication Year :
- 2023
- Publisher :
- Royal Society of Chemistry (RSC), 2023.
-
Abstract
- Medium-range ordering within the amorphous TiO2 thin film is revealed by 4-D STEM and the atomic configuration is determined by multi-objective structure optimization StructOpt guided by experimental data and theoretical constraints.
- Subjects :
- General Materials Science
Subjects
Details
- ISSN :
- 20403372 and 20403364
- Volume :
- 15
- Database :
- OpenAIRE
- Journal :
- Nanoscale
- Accession number :
- edsair.doi...........4de6cd351e6a7b287c5fce0343dd6186
- Full Text :
- https://doi.org/10.1039/d2nr03614b