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Large-Area Vertical Silicon Nanocolumn Arrays for Versatile Cell Interfaces

Authors :
Seong-Min Kim
Jeong-Ah Kim
Myung-Han Yoon
Dongyoon Kim
Dong-Hee Kang
Ji Hwan Kim
Seyoung Lee
Source :
ACS Applied Nano Materials. 4:2528-2537
Publication Year :
2021
Publisher :
American Chemical Society (ACS), 2021.

Abstract

Despite the facile fabrication of geometry-controlled vertical silicon nanocolumn arrays (vSNAs), metal-assisted chemical etching (MACE) showed critical limitations for producing vSNAs, particularl...

Details

ISSN :
25740970
Volume :
4
Database :
OpenAIRE
Journal :
ACS Applied Nano Materials
Accession number :
edsair.doi...........4d4575021d4f5671f34ac5ed835f4e95