Cite
GaN films deposited by planar magnetron sputtering
MLA
Kouhei Furutani, et al. “GaN Films Deposited by Planar Magnetron Sputtering.” Vacuum, vol. 66, Aug. 2002, pp. 233–37. EBSCOhost, https://doi.org/10.1016/s0042-207x(02)00147-1.
APA
Kouhei Furutani, Takao Hanabusa, Takashi Mukai, Takuya Kikuma, Kikuo Tominaga, & Kazuya Kusaka. (2002). GaN films deposited by planar magnetron sputtering. Vacuum, 66, 233–237. https://doi.org/10.1016/s0042-207x(02)00147-1
Chicago
Kouhei Furutani, Takao Hanabusa, Takashi Mukai, Takuya Kikuma, Kikuo Tominaga, and Kazuya Kusaka. 2002. “GaN Films Deposited by Planar Magnetron Sputtering.” Vacuum 66 (August): 233–37. doi:10.1016/s0042-207x(02)00147-1.