A micro thermal and stress isolation platform for inertial sensors

MEMS gyroscopes are known to be susceptible to environmental factors, including temperature and stress. Many studies have shown various methods to reduce the effects of these factors, of which introducing a mechanical isolation platform has been proven the most effective. In this paper, we study three design considerations for a thermal and stress isolation platform for inertial sensors: resonant frequency, stress-relieving ability, and thermal resistance. The isolation platform design is then optimized to minimize stress effects and thermal losses. Experimental results show that the isolation platform reduces the stress sensitivity of commercial gyroscopes by a factor of 92x on the most effective axis and increases thermal resistance to around 1,100 K/W.