Fast Spatial Sampling with Phase Controlled Resonant Scanner

Through phase controlling a 2D MEMS scanner, we achieve fast and flexible spatial information sampling for use in LiDAR systems. The scanning pattern is designed for desired operational characteristics, e.g. data collection frame time, actuation amplitude, sampling efficiency and Regions-of-Interest (roi) focus. A hardware prototype with wide-band phase control is also demonstrated. This system facilitates fast LiDAR operation at ~ 100hz frame rate.